[PDF] Introduction to Microdevices and Microsystems - McGill Physics

76590_3vengallatore1.pdf 1

PHYS 534 (Fall 2008)

Module on Microsystems & Microfabrication

Lecture 1

Introduction to Microdevices

1 and Microsystems

Srikar Vengallatore, McGill University

Outline of Lecture

•Introduction to Microsystems -Basic definitions and examples -How are they designed? -How are they manufactured? 2 2

Introduction to Microsystems

Micro: SmallSystemInput Output

•System dimensions: 1 mm to 10 cm •Structural components: 10 nm to 100 m 3 •Designed and manufactured to perform useful activity

LENGTH SCALES

10 -3 m = 1 mm 10 -4 m = 100 m 10 -5 m = 10 m 10 -6 m = 1 m 10 -7 m = 100 nm

Molecules

BacteriaSTRUCTURES

FOR

MICROSYSTEMS

4 10 -8 m = 10 nm 10 -9 m = 1 nm 10 -10 m = 0.1 nm Atoms 3 1 m 1m 1 mm 5 1 nm 1 m

Source: Kalpakjian and Schmid

Example 1.

Integrated Circuit

>1 Million wires per cm 2 !>1 Million wires per cm 2 ! •No moving parts •$200 Billion per year •

Revolutionary

6 (I.B.M)

Revolutionary

(Internet, computers,...) 4

Cross-Section of an I.B.M Integrated Circuit

Copper

Silicon dioxide

7

Silicon

Tungsten

1 m

Example 2: Texas Instruments Micromirrors

11 m 8

DIGITAL LIGHT PROCESSING (DLP)

5 9

Torsional

Hi

Electron Micrograph of Texas Instruments DMD

Hinge 10 www.dlp.com 6 11

Samsung DLP TVsDLP Projectors

12 7 13

Some Terminology

Microsystems are known by many names.....

•Microdevices •Microelectronics Mi l t h i l S t (MEMS)•Microelectromechanical Systems (MEMS) •Microsystems Technology (MST) •Microfluidic systems •Micro total analysis systems (micro-TAS) •Bio-MEMS/ Bio-microsystems •OpticalMEMS/ Optical microsystems 14 •Optical-MEMS/ Optical microsystems •RF-MEMS (for radio-frequency MEMS) •Power MEMS (micro-engines, micro fuel cells) •... 8

Terminology Reflects Evolution of Technology

•In the beginning, there was the transistor.....

Invented in 1947 in

...Nothing microyet!Bell Labs. 15

Walter Brattain

John Bardeen

William Shockley

Nobel Prize in Physics

(1956) 16 9

Use of a Transistor in an Electrical Circuit

17

Jack Kilby, Texas Instruments

The World's First Integrated Circuit

Aluminum Wires

(Interconnects) 18 •Robert Noyce 10

Kilby: Nobel Prize for Physics (2000)

19

Robert Noyce

(co-founder of Intel)

Evolution of Integrated Circuits (1950 - 2000)

Year# of Transistors per device

1960 < 100

197010

4 (4004 8008)197010 4 (4004, 8008)

1980 10

5 (386 processor)

1990 10

6 (486 processor)

19922x10

6 (Pentium processor) 20

19922 x 10(Pentium processor)

1996 10

7 (Pentium II)

2000 10

8 (Pentium 4) 11

Stage 2: From Microelectronics to Micromechanics

1970s: Realization that mechanical components can

also be miniaturized Emer gence of micromachined pressure gp sensors

Sealed Vacuum Cavity

Membrane

21

Pressure Port (P)

•Estimate pressure by measuring deflection

Pressure Sensors: Principle of Operation

8 mm 22
12 Micromachined Pressure Sensors are now Widely Used 23
www.issys-mems.com

1980s: Micro Sensors and Actuators

•Sensors for force, acceleration, pressure, mass,....

Micromachined Accelerometers

24
~8 million accelerometers are manufactured each year

Analog Devices

13 mk Fmak a