[PDF] Surface and Thickness Measurement in the Targetlab of GSI



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Surface and Thickness Measurement in the Targetlab of GSI GSI Helmholtzzentrum für Schwerionenforschung GmbH GSI Helmholtzzentrum für Schwerionenforschung GmbH

Surface and Thickness

Measurement in the

Targetlab of GSI

Birgit Kindler, Elif Celik Ayik, Annett Hübner,

Bettina Lommel, Jutta Steiner,

Vera Yakusheva

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Outline

™Introduction

™Analytical Tools

™MicroProf®

™System features

™Measuring principle

™Examples of Applications

™Future Perspectives

2 Birgit Kinder INTDS 2018 East Lansing 8.10.2018

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Introduction

™Role of Analytics at GSI Targetlab

™Quality control of samples produced in the lab

™Weight

™Thickness

™Surfaces

™Topology

™Roughness

™Composition

™Impurities

™Documentation of sample parameters

™Analytics for internal and external customers

3 Birgit Kinder INTDS 2018 East Lansing 8.10.2018

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Analytical Tools

™Optical Microscopes with image acquisition software

™Leitz and Leica

4 Birgit Kinder INTDS 2018 East Lansing 8.10.2018

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Orthoplan Largefield Mikroskope from Leitz

5 8.10.2018 Birgit Kinder INTDS 2018 East Lansing

Stereo Zoom-Microscope

Magnifcation 6.3x 50x

Orthoplan Largefield Microscope

Magnifcation 25.6x 640x

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Analytical Tools

™Optical Microscopes with image acquisition software

™Leitz and Leica

™Balances

™Mettler Toledo: Several analytical balances in different ranges and one microbalance

6 Birgit Kinder INTDS 2018 East Lansing 8.10.2018

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Orthoplan Largefield Mikroskope from Leitz

7 8.10.2018 Birgit Kinder INTDS 2018 East Lansing

Microbalance UMX2

Readability 0.1 µg / reproducibility ± 0.25 µg

Analytical Balance XPE206DR

Readability 0.01 mg / reproducibility ± 0.015 mg GSI Helmholtzzentrum für Schwerionenforschung GmbH

Analytical Tools

™Optical Microscopes with image acquisition software

™Leitz and Leica

™Balances

™Mettler Toledo: Several analytical balances in different ranges and one microbalance

™Length Gauges

™Heidenhain: Two with 60 mm, two with 10 mm travel; 0.5 µm accuracy each

8 Birgit Kinder INTDS 2018 East Lansing 8.10.2018

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Orthoplan Largefield Mikroskope from Leitz

9 8.10.2018 Birgit Kinder INTDS 2018 East Lansing

10 mm travel; ± 0.5 µm accuracy

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Analytical Tools

™Optical Microscopes with image acquisition software

™Leitz and Leica

™Balances

™Mettler Toledo: Several analytical balances in different ranges and one microbalance

™Length Gauges

™Heidenhain: Two with 60 mm, two with 10 mm travel; 0.5 µm accuracy each

™UV-vis Spectralphotometer

™GBC: Double beam arrangement; 190 900 nm wavelength range

10 Birgit Kinder INTDS 2018 East Lansing 8.10.2018

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Orthoplan Largefield Mikroskope from Leitz

11 8.10.2018 Birgit Kinder INTDS 2018 East Lansing

GBC: Double beam arrangement; 190 900 nm wavelength range GSI Helmholtzzentrum für Schwerionenforschung GmbH

Analytical Tools

™Optical Microscopes with image acquisition software

™Leitz and Leica

™Balances

™Mettler Toledo: Several analytical balances in different ranges and one microbalance

™Length Gauges

™Heidenhain: Two with 60 mm, two with 10 mm travel; 0.5 µm accuracy each

™UV-vis Spectralphotometer

™GBC: Double beam arrangement; 190 900 nm wavelength range ™Scanning Electron Microscope with Energy Dispersive X-ray Analysis ™Philips: upgrade of detector and control software

12 Birgit Kinder INTDS 2018 East Lansing 8.10.2018

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Orthoplan Largefield Mikroskope from Leitz

13 8.10.2018 Birgit Kinder INTDS 2018 East Lansing

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Analytical Tools

™Optical Microscopes with image acquisition software

™Leitz and Leica

™Balances

™Mettler Toledo: Several analytical balances in different ranges and one microbalance

™Length Gauges

™Heidenhain: Two with 60 mm, two with 10 mm travel; 0.5 µm accuracy each

™UV-vis Spectralphotometer

™GBC: Double beam arrangement; 190 900 nm wavelength range ™Scanning Electron Microscope with Energy Dispersive X-ray Analysis ™Philips: upgrade of detector and control software

™Target Scanner

™Self-construction from scratch for surface and thickness measurement

14 Birgit Kinder INTDS 2018 East Lansing 8.10.2018

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Orthoplan Largefield Mikroskope from Leitz

15 8.10.2018 Birgit Kinder INTDS 2018 East Lansing

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Orthoplan Largefield Mikroskope from Leitz

16 8.10.2018 Birgit Kinder INTDS 2018 East Lansing

GSI Helmholtzzentrum für Schwerionenforschung GmbH

Analytical Tools

™Optical Microscopes with image acquisition software

™Leitz and Leica

™Balances

™Mettler Toledo: Several analytical balances in different ranges and one microbalance

™Length Gauges

™Heidenhain: Two with 60 mm, two with 10 mm travel; 0.5 µm accuracy each

™UV-vis Spectralphotometer

™GBC: Double beam arrangement; 190 900 nm wavelength range ™Scanning Electron Microscope with Energy Dispersive X-ray Analysis ™Philips: upgrade of detector and control softwarequotesdbs_dbs7.pdfusesText_5