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![Surface and Thickness Measurement in the Targetlab of GSI Surface and Thickness Measurement in the Targetlab of GSI](https://pdfprof.com/Listes/18/14802-1834-Kindler-Surface-and-Thickness-Measurement-in-the-Targetlab-of-GSI.pdf.pdf.jpg)
GSI Helmholtzzentrum für Schwerionenforschung GmbH GSI Helmholtzzentrum für Schwerionenforschung GmbH
Surface and Thickness
Measurement in the
Targetlab of GSI
Birgit Kindler, Elif Celik Ayik, Annett Hübner,
Bettina Lommel, Jutta Steiner,
Vera Yakusheva
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Outline
Introduction
Analytical Tools
MicroProf®
System features
Measuring principle
Examples of Applications
Future Perspectives
2 Birgit Kinder INTDS 2018 East Lansing 8.10.2018
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Introduction
Role of Analytics at GSI Targetlab
Quality control of samples produced in the lab
Weight
Thickness
Surfaces
Topology
Roughness
Composition
Impurities
Documentation of sample parameters
Analytics for internal and external customers
3 Birgit Kinder INTDS 2018 East Lansing 8.10.2018
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Analytical Tools
Optical Microscopes with image acquisition software
Leitz and Leica
4 Birgit Kinder INTDS 2018 East Lansing 8.10.2018
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Orthoplan Largefield Mikroskope from Leitz
5 8.10.2018 Birgit Kinder INTDS 2018 East Lansing
Stereo Zoom-Microscope
Magnifcation 6.3x 50x
Orthoplan Largefield Microscope
Magnifcation 25.6x 640x
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Analytical Tools
Optical Microscopes with image acquisition software
Leitz and Leica
Balances
Mettler Toledo: Several analytical balances in different ranges and one microbalance
6 Birgit Kinder INTDS 2018 East Lansing 8.10.2018
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Orthoplan Largefield Mikroskope from Leitz
7 8.10.2018 Birgit Kinder INTDS 2018 East Lansing
Microbalance UMX2
Readability 0.1 µg / reproducibility ± 0.25 µg
Analytical Balance XPE206DR
Readability 0.01 mg / reproducibility ± 0.015 mg GSI Helmholtzzentrum für Schwerionenforschung GmbH
Analytical Tools
Optical Microscopes with image acquisition software
Leitz and Leica
Balances
Mettler Toledo: Several analytical balances in different ranges and one microbalance
Length Gauges
Heidenhain: Two with 60 mm, two with 10 mm travel; 0.5 µm accuracy each
8 Birgit Kinder INTDS 2018 East Lansing 8.10.2018
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Orthoplan Largefield Mikroskope from Leitz
9 8.10.2018 Birgit Kinder INTDS 2018 East Lansing
10 mm travel; ± 0.5 µm accuracy
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Analytical Tools
Optical Microscopes with image acquisition software
Leitz and Leica
Balances
Mettler Toledo: Several analytical balances in different ranges and one microbalance
Length Gauges
Heidenhain: Two with 60 mm, two with 10 mm travel; 0.5 µm accuracy each
UV-vis Spectralphotometer
GBC: Double beam arrangement; 190 900 nm wavelength range
10 Birgit Kinder INTDS 2018 East Lansing 8.10.2018
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Orthoplan Largefield Mikroskope from Leitz
11 8.10.2018 Birgit Kinder INTDS 2018 East Lansing
GBC: Double beam arrangement; 190 900 nm wavelength range GSI Helmholtzzentrum für Schwerionenforschung GmbH
Analytical Tools
Optical Microscopes with image acquisition software
Leitz and Leica
Balances
Mettler Toledo: Several analytical balances in different ranges and one microbalance
Length Gauges
Heidenhain: Two with 60 mm, two with 10 mm travel; 0.5 µm accuracy each
UV-vis Spectralphotometer
GBC: Double beam arrangement; 190 900 nm wavelength range Scanning Electron Microscope with Energy Dispersive X-ray Analysis Philips: upgrade of detector and control software
12 Birgit Kinder INTDS 2018 East Lansing 8.10.2018
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Orthoplan Largefield Mikroskope from Leitz
13 8.10.2018 Birgit Kinder INTDS 2018 East Lansing
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Analytical Tools
Optical Microscopes with image acquisition software
Leitz and Leica
Balances
Mettler Toledo: Several analytical balances in different ranges and one microbalance
Length Gauges
Heidenhain: Two with 60 mm, two with 10 mm travel; 0.5 µm accuracy each
UV-vis Spectralphotometer
GBC: Double beam arrangement; 190 900 nm wavelength range Scanning Electron Microscope with Energy Dispersive X-ray Analysis Philips: upgrade of detector and control software
Target Scanner
Self-construction from scratch for surface and thickness measurement
14 Birgit Kinder INTDS 2018 East Lansing 8.10.2018
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Orthoplan Largefield Mikroskope from Leitz
15 8.10.2018 Birgit Kinder INTDS 2018 East Lansing
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Orthoplan Largefield Mikroskope from Leitz
16 8.10.2018 Birgit Kinder INTDS 2018 East Lansing
GSI Helmholtzzentrum für Schwerionenforschung GmbH
Analytical Tools
Optical Microscopes with image acquisition software
Leitz and Leica
Balances
Mettler Toledo: Several analytical balances in different ranges and one microbalance
Length Gauges
Heidenhain: Two with 60 mm, two with 10 mm travel; 0.5 µm accuracy each
UV-vis Spectralphotometer
GBC: Double beam arrangement; 190 900 nm wavelength range Scanning Electron Microscope with Energy Dispersive X-ray Analysis Philips: upgrade of detector and control softwarequotesdbs_dbs7.pdfusesText_5