[PDF] Research Plan 06-Apr-2018 UMR 7334

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UMR7334,CNRS,Universitésd'Aix-Marseille(AMU)etdeToulon(UTLN)PANEL on ALLSENSORS sandrine.bernardini@im2np.fr

2

Sensorsaresolidstatedeviceswiththecapacityofreadingthestateoftheambientinsideand/o routsideofalivingbodyanditsvari aLonsinLmeandspacedomain.ThescopeistodialoguewiththestateinordertogetinformaLon,measure,store,processandcommunicatedata

Definition

2

Applications

3

Sensor fabrication steps

Pr.AD'AMICO

4 Limit of scale imposed by the technology APM Stone Wood Iron Silicon Atoms CNT Cells DNA

Improvement of tehcnological processes Physical and Chemical principles of selforganisation and self asembly

NanoscalE

The technology evolution

5

Flexible PCB

AntonioValente,INESCTEC,Portugal

MOXSensorTrends

Trends and chalenges in using Micro and Nanotechnologies 6 MCI

PANEL on ALLSENSORS

sandrine.bernardini@im2np.fr

MOXSensorTrends

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Ø Gas sensor Market Ø Research trends

OUTLINE

8

Pollution

AirpolluLon=morethan4.7millionsofdeath

9

Forecast

Mostimportantmarkets:China,US,Germany

10

Advantages of MicroSensors

Traditional environmental monitoring methods:

ü Low cost (< $10 per unit) ü Low power ( < 30 mW) ü Small ( < 10 mm 3

) ü Easily integrated into a wide range of products • Are expensive (>$15,000-50,000 per unit) • Require trained personnel to interpret data • Require regular maintenance • Analyse a very limited sample of air • Are often poorly positioned: on top of buildings/ away from people • Have low spatial coverage

Micro - sensors are:

Spectroscopy,Chromatography11

Manufacturers:

marketsgassensorsoluLons

Newmanufacturers

Austria

12

Agenda

LowpowerconsumpLon

Bulkµ-machiningofSisubstrates

AmbiantT

Light

HighsensiLvity

N-structuredMOX(HighS/VraLo)

UseofmetalN-parLclesUseofsensorarrays

Trends in MOX gas sensing

Lowcost

MOX

FlexiblesubstratesUpilex(upto400ºC)

13

Flexiblesensors

RENATECH : French Network for nanofabrication

heps://www.renatech.org/en/14

Trends in MOX gas sensing at IM2NP

Transducer:2x2mm

2mm

AcLvepart:400x400µm

Miniaturisa1onGasMul1-sensors

IM2NP-LAASIM2NP

Flexiblesensors0.350 mm

14.5 mm 5.3 mm

MODELISATION THERMOELECTRIC

Couche sensible WO

3 Électrodes de mesures (Pt)Chauffage intégré (Pt)

Fluidic

Microsystem

1,36 cm 0,52 cm

15 16

Future

• Gas sensors are/will be met everywhere in the future • Many technologies have been developed in the last 30 years • Not big advancements in the market • Low cost (1 - 10 €), but high repetitivity and life ti me are necessary • Ultra low power for portable systems. Microtechnologies • Nano features are necessary to increase S/V ratio. • Improvement of sensitivity, selectivity, time response, working temperature • If low power devices are developd, then: - flexilbe sustrates - microenergy sources: harvesting ?...

Future aspects and main Hh0llen°es oK

printeº eleHtroniHs Kor sensor teHhnolo°y

Almudena Eiv0ºeneyr0

Institute for Nanoelectronics

GeHhniH0l Fniversity oK .uniHh

,ferm0nyC

Internet of Things

06i2pris- t

Things HonneHteº to Ghin°s AE possiµle to 0HHess º0t0 Krom a ºist0nHe 0nº to remotely monitor 0nº Hontrol our physiH0l worlº

Smart environment

Smart cities

Lo°istiHs

mnºustri0l Hontrol

Domotics

eHealth from $655.8 billion in 2014 to $1.7 trillion in 2020

IoT Dimensions

06i2pris- é

Sensors

wirHuit 0nº 5ystem ºesi°n wommuniH0tion 0nº seHurity ci° º0t0 proHessin°

Sensors in the IoT

06i2pris- d

‡Wide spectrum of parameters to be covered ² li°htn r0ºi0tionn pressuren 0HHeler0tionn temper0turen °0sesn humiºityn µlooº pressuren he0rt r0tevvv ‡Rapid increase in the number of sensors: mn trtrn 25 Billion connected "Things" will be in use ‡Desirable features: LowiHostn °reen eleHtroniHsn low power

Honsumption

Sensors Technology

06i2pris- '

Silicon technology

Conventional ICiw.D5

teHhnolo°y

9Miniaturization

9IC integration

9Welliest0µlisheº

xGeHhnolo°y Host xy0µriH0tion Honºitions x5ust0in0µility

Printed Electronics

Traditional printing techniques

9Environmental friendly

9Large scale: LowiHost 0nº

ease of redesign

9Flexible substrates

x5ize xLow perKorm0nHe

Sensors Technology

06i2pris- A

Silicon technology

Conventional ICiw.D5

teHhnolo°y

9Miniaturization

9IC integration

9Welliest0µlisheº

xGeHhnolo°y Host xy0µriH0tion Honºitions x5ust0in0µility

Printed Electronics

Traditional printing techniques

9Environmental friendly

9Large scale: LowiHost 0nº

ease of redesign

9Flexible substrates

x5ize xLow perKorm0nHe

Hybrid

eleHtroniHs

Open Discussion

Future aspects and main Hh0llen°es oK

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