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UMR 7334, CNRS, Universités d'Aix-Marseille (AMU) et de Toulon (UTLN) 6.0nm

Mechanicalpropertiesat smallscales

Thomas W. Cornelius (thomas.cornelius@im2np.fr)

CNRS Researcher

Co-responsable of Mechanicsof Nano-Objects(MNO) researchteam 1 UMR 7334, CNRS, Universités d'Aix-Marseille (AMU) et de Toulon (UTLN)

Researchtopics

•Mechanicsof nano-objects •Strainin microelectronicdevices

Techniques/Methods

•(Synchrotron) X-ray diffraction •Transmission electronmicroscopy(TEM) •MD simulation 2

MechanicsofNano-Objects

4-circle diffractometer

Tensilestage Deben

Anton Paarfurnace

Optical curvature

measurement

Z. Ren et al.,J. Synchrotron

Radiat. 21 (2014) 1128

In-situ AFM SFINX

micro-chips

In situ biasing/ heating

TEM sampleholder

CNRS fundedIRP "DASEIN» withUniversityof California Santa Barbara (UCSB) on defectand strainengineering in materialsfor new and improvedproperties8 permanents, 2 PhDs, 2 postdocs, 2 ATER UMR 7334, CNRS, Universités d'Aix-Marseille (AMU) et de Toulon (UTLN) in situnano-mechanics inversion algorithms PyNX

3D Bragg

reflection F Au crystal Bragg coherentX-ray diffraction imagingLaue microdiffraction

3D displacementfield, defects

Displacementres.: few pm

3D electrondensity, shape

Spatial resolution: 10 nm

F. Lauraux, PhD thesis,

Aix-Marseille Université

(2020) C. Leclereet al., J. Synchrotron Radiat. 23 (2016) 1395

Z. Ren et al., J. Appl. Phys. 124 (2018) 185104

diffracted

X-rays

BM32

M. Duprazet al., Nano

Lett. 17 (2017) 6696

Peak shapeanalysis

providesdislocation density 3 0 [112] [110] [111] [111] [112] [110] UMR 7334, CNRS, Universités d'Aix-Marseille (AMU) et de Toulon (UTLN) in situ X-ray diffraction T.W. Cornelius et al., J. Appl. Phys. 122 (2017) 164104

T.W. Cornelius et al., Materials 13 (2020) 3338

time resolvedresponse V incidentX-rays

Au electrodes

mechanicsof polymerson flexible substratespiezoelectricferroelectricthinfilms

Tensile testing

machine 2D

Detector

(100) (200) (PDMS) (100) (010)

051015202530354045

-2.0 -1.8 -1.6 -1.4 -1.2 -1.0 -0.8 -0.6 -0.4 -0.2 0.0 0.2

Stretch (%)

(100) Peak 20% 4 UMR 7334, CNRS, Universités d'Aix-Marseille (AMU) et de Toulon (UTLN) dislocation microstructure

HRTEM of dislocation microstructures in Si

nanopillarsdeformedat room temperature Depending on loading conditions (notably compression axis), various types of defects are produced: perfect and partial dislocations, nano- twins, {115} defects,... Observation of unusual defects located in {115} planes

Comparison between experimental image and MD

Experimental HRTEM image

MD simulation

Simulated HRTEM

Experimental HRTEM

5 total displacement fielduz energy separationintotwo

Schockleypartials

M. Gailhanou, J.-M.

Roussel, Phys. Rev.

B 88(2013) 114101

Molecularstaticsimulation of screw

dislocation in Cu nanowire

A. Merabetet al. Acta Mater 161 (2018) 54

UMR 7334, CNRS, Universités d'Aix-Marseille (AMU) et de Toulon (UTLN) internship/ expertise

Mechanicalpropertiesat smallscales

(Synchrotron) X-ray diffraction

Bragg coherentX-ray

diffraction imaging

Laue micro-

diffraction nano-indentationthree-point bending diffractedX-rays tensile testing nanofocused

X-ray diffraction

mapping 6 high-resolutionTEM understandingof defectnucleationand evolutionin defectscarcenanostructuresquotesdbs_dbs48.pdfusesText_48

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